Vacuum Load Lock Door

Ln 2 cooling or heating samples up to 600 c.

Vacuum load lock door.

A range of options exist for e g. Mdc vacuum products llc is an iso 9001 2015 certified company. Doors are hinged and fitted with a swingaway hand knob locking mechanism. 022 transfer valve monovat direct for load lock and process chamber isolation in semiconductor production systems for 200 300 and 450 mm wafers.

Offered in a wide range of uhv flange sizes with or without viewport glass. The top port of the load lock chamber mechanism is usually sealed by a viton gasket. They are designed for base pressures between 1x10 7 mbar and 1x10 9 mbar. Load lock chambers are provided with a six inch cf flange for mounting to the gate valve a six inch add a door with 7056 glass viewport a 2 75 inch cf flange for attachment of the linear feedthrough and two 2 75 inch cf flanges for pumping.

30ºc maximum when attached. Fast entry access load lock doors hardware replacement parts contact us to contact someone directly please click here or call 1 412 387 9200 to get in contact with your dedicated sales team. Description quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. Precision hinged access doors seal with a fluorocarbon o ring.

The chambers are equipped with uhv connecting flanges and additional ports for future versatility. Home motion manipulation manipulation load lock systems bolt kits for quick access doors with clearance holes. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. 1x10 10 torr temperature range 20ºc to 150ºc magnets must be removed for 150ºc rating.

Quick access doors provide convenient and fast manual loading of samples in and out of vacuum chambers. For conversion tables click here. Viewport fitted doors are constructed with corning type 7056 glass fused to a kovar nickel iron transition sleeve. For complete instructions and parts needed to fix your door locks and other related vacuum problems go here.

For load lock and process chamber isolation in semiconductor production systems for 200 and 300 mm wafers. Bolt kits for quick access doors with clearance holes. All access doors are supplied with viton elastomer seals suitable for high vacuum service.